Title:
Micro and smart systems : technology and modeling
Author:
Ananthasuresh, G. K.
ISBN:
9780470919392
Publication Information:
Hoboken, NJ : John Wiley and Sons, ©2012.
Physical Description:
xxi, 474 pages : illustrations ; 27 cm
Contents:
Note continued: 9.2. Scaling in the Electrostatic Domain -- 9.3. Scaling in the Magnetic Domain -- 9.4. Scaling in the Thermal Domain -- 9.5. Scaling in Diffusion -- 9.6. Scaling in Fluids -- 9.7. Scaling Effects in the Optical Domain -- 9.8. Scaling in Biochemical Phenomena -- 9.9. Scaling in Design and Simulation -- 9.10. Summary -- ch. 10 Simulation of Microsystems Using FEA Software -- 10.1. Background -- 10.2. Force-Deflection of a Tapering Helical Spring Using ABAQUS -- 10.3. Natural Frequencies of an Accelerometer in ANSYS -- 10.4. Deflection of an Electro-Thermal-Compliant (ETC) Microactuator in COMSOL MultiPhysics -- 10.5. Lumped Stiffness Constant of a Comb-Drive Suspension in NISA -- 10.6. Piezoelectric Bimorph Beam in a Customized FEA Program -- 10.7. Resonant Micro-Accelerometer in ABAQUS -- 10.8. Pull-In Voltage of an RF-MEMS Switch in IntelliSuite -- 10.9.A Capacitive Pressure Sensor in Coventorware -- 10.10. Summary.
Abstract:
"This first undergraduate-level textbook on microsystems and smart systems makes a burgeoning area of professional practice accessible to course teaching. It is based on a course introduced at VTU in India in 2009, which has already been taught to nearly 1000 students. Practical examples and exercises will set this book apart from the professional reference books currently in use as texts on the subject"-- Provided by publisher.
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Electronic Access:
Cover image http://catalogimages.wiley.com/images/db/jimages/9780470919392.jpg